SEMINAR 

　　Key Lab of Inorganic Functional Materials and Devices, CAS 

　　中国科学院无机功能材料与器件重点实验室 

　　MIS-Structure Sensors with Solid Electrolyte Gate Layer for Detection of Explosive and Hazardous Gases 

　　Professor Alexey Vasiliev 

　　Kurchatov complex of chemical and physical technology 

　　NRC Kurchatov Institute 

　　时间：2018年3月9日（星期五）上午9:30 

　　地点： 嘉定园区F7第二会议室 

　　联系人：刘志甫（69906595） 

　　报告摘要： 

　　The sensors based on a structure metal-insulator-semiconductor (MIS) are well known detectors of low concentrations of hydrogen and have several important advantages compared to other types of sensors: they operate at room temperature, are produced using Si-compatible technology, and, therefore, can be applied in mass-application instruments including wireless networks. In this lecture we consider the application of MIS structure gas sensors for the detection of concentrations of a number of hazardous gases, which can be dangerous themselves (fluorine, hydrogen fluoride, H₂S, NO₂, etc.) as toxic agents or are important from ecological point of view (for example, chlorofluorocarbons, which destroy ozone layer and are responsible for green-house effect). The third class of gases like hydrogen is indicator of early stage of fire (smoldering) and is used for prevention of hazardous situation. 

　　MIS structure sensors have a structure Si(SiC)/SiO₂/solid electrolyte/Pt(Pd). Solid electrolytes, which can be used in this case are LaF₃ (F^- conducting) or various proton conducting materials. Recently, the possibility of the application of ion-exchange materials is also under study. This structure enables the separation of two processes responsible for gas response: electrochemical reaction on three-phase interface gas/Pt/solid electrolyte and ionosorption on the solid electrolyte/SiO₂ interface. This separation of processes accelerates significantly overall process compared to traditional hydrogen MIS-structure sensors with Pd gate.  

　　欢迎广大科研人员和研究生参加！