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论文题目:
Novel screen-printed ceramic MEMS microhotplate for MOS sensors
作者:
Kul, Oleg; Vasiliev, Alexey; Shaposhnik, Alexey; Nikitin, Andrey; Dmitrieva, Anna; Bolshakov, Alexandr; Liu, Zhifu; Ma, Mingsheng; Mokrushin, Artem; Simonenko, Nikolay; Simonenko, Elizaveta
刊物名称:
SENSORS AND ACTUATORS A-PHYSICAL
发表年度:
2024
卷:
379
期:
页码:
