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论文题目:
The Effect of Deposition Temperature on TiN Thin Films for the Electrode Layer of 3D Capacitors Prepared by Atomic Layer Deposition
作者:
Chen, Xingyu; Zhang, Jing; Gao, Lingshan; Zhang, Faqiang; Ma, Mingsheng; Liu, Zhifu
刊物名称:
COATINGS
发表年度:
2024
卷:
14
期:
6
页码:
