Vibration Analysis and Active Control of Test Sample Suspended in Electrostatic Levitation Field--中国科学院上海硅酸盐研究所

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论文题目:

Vibration Analysis and Active Control of Test Sample Suspended in Electrostatic Levitation Field

作者:

Xiang, Biao; Wang, Chaoyue; Wen, Tao

刊物名称:

IEEE SENSORS JOURNAL

发表年度:

2022

卷:

期:

页码:

15782-15792