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论文题目:
Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films
作者:
Liu, Meng; Yang, Yong; Mao, Quan; Wei, Yuquan; Li, Yajie; Ma, Ningning; Liu, Huan; Liu, Xuejian; Huang, Zhengren
刊物名称:
CERAMICS INTERNATIONAL
发表年度:
2021
卷:
47
期:
17
页码:
24098—24105
