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论文题目:
Optimization of the pulsed laser deposition process of In2O3 thin films for ferroelectric field effect device applications
作者:
Xu, Meng; Guo, Lei; Yan, Jian-Min; Xu, Zhi-Xue; Wang, Hui; Gao, Guan-Yin; Zheng, Ren-Kui
刊物名称:
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
发表年度:
2021
卷:
32
期:
2
页码:
1659—1667
