当前位置：首页 > 论文库
论文数据
论文题目:
Deposition Temperature and Heat Treatment on Silicon Nitride Coating Deposited by LPCVD
作者:
Liao Chun-Jing; Dong Shao-Ming; Jin Xi-Hai; Hu Jian-Bao; Zhang Xiang-Yu; Wu Hui-Xia
刊物名称:
JOURNAL OF INORGANIC MATERIALS
发表年度:
2019
卷:
期:
页码:
