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论文题目:
Nanoscale depth control of implanted shallow silicon vacancies in silicon carbide
作者:
Li, Qiang; Wang, Jun-Feng; Yan, Fei-Fei; Cheng, Ze-Di; Liu, Zheng-Hao; Zhou, Kun; Guo, Li-Ping; Zhou, Xiong; Zhang, Wei-Ping; Wang, Xiu-Xia; Huang, Wei; Xu, Jin-Shi; Li, Chuan-Feng; Guo, Guang-Can
刊物名称:
NANOSCALE
发表年度:
2019
卷:
期:
页码:
