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论文题目:
Porous AlN with a Low Dielectric Constant Synthesized Based on the Physical Vapor Transport Principle
作者:
Wang, Hua-Jie; Liu, Xue-Chao; Kong, Hai-Kuan; Xin, Jun; Gao, Pan; Shi, Er-Wei
刊物名称:
JOURNAL OF ELECTRONIC MATERIALS
发表年度:
2016
卷:
45
期:
页码:
3263
